Slotted Graphite Plates for Flow Guidance | High-Purity Slotted Graphite Plates Specifically Designed for Semiconductor CVD Vacuum Equipment - NHD Carbon

▍Product Description

Slotted graphite plates are custom graphite substrates independently developed by NHD Carbon Industries for semiconductor chemical vapor deposition (CVD) vacuum equipment. Unlike ordinary flat graphite plates, the surface of these plates undergoes precision five-axis CNC milling to create uniform parallel flow channels, closely spaced grooves, and trapezoidal flow paths. This design ensures uniform dispersion of reaction gases within the chamber and stable heat transfer, addressing industry pain points such as uneven gas flow distribution and significant deviations in wafer coating thickness, and rapid local high-temperature oxidation and wear. This grooved graphite plate is made from high-purity graphite raw material derived from Daqing needle coke. It undergoes multiple rounds of vacuum impregnation and high-temperature graphitization purification at 2,800°C, resulting in an ash content as low as 0.03%, and contains no metal impurities that could contaminate silicon wafers. It is compatible with both small-scale laboratory CVD equipment and mass-production semiconductor coating lines. All groove specifications, plate thicknesses, and flow channel depths can be custom-manufactured according to the customer’s equipment CAD drawings.

Fine V-Groove Plate

Flat Groove Sheet

Deep V-Groove Pair

▍Key Product Features

1. Customized Grooving Structure: Supports machining of various flow channel patterns, including wide rectangular flow channels, fine serrated flow channels, trapezoidal grooves, and segmented grooves of varying depths. Groove spacing, depth, and width can be 100% adjusted to meet equipment process requirements; milled as a single piece, the groove walls are smooth and burr-free, preventing graphite dust from contaminating the vacuum chamber.

2. High-Purity, Low-Impurity Substrate: Ultra-high-purity isostatic graphite is selected. The raw material purification process removes metallic impurities such as iron, silicon, and calcium, ensuring no particulate matter is released under high-temperature conditions and eliminating pinholes and discoloration defects on wafers and optical coatings.

3. High-Density, Monolithic Sheets: The overall density of the sheets reaches 1.80–1.85 g/cm³, with extremely low internal porosity, effectively preventing corrosive process gases from penetrating the substrate and significantly extending the service life of the sheets.

4. Precision CNC Machining Tolerances: With our in-house CNC finishing workshop, tolerances for panel dimensions and slot sizes are controlled within ±0.02 mm. The panels feature high flatness, ensuring a perfect fit with the base inside the CVD furnace and providing uniform heat conduction without localized temperature differences.

5. Optional Anti-Oxidation Hardening Treatment: For long-term, continuous high-temperature production conditions, a specialized anti-oxidation impregnation coating can be applied, which improves oxidation resistance by 40% in a 2000°C vacuum environment, thereby reducing downtime and costs associated with frequent panel replacements.

Dense Groove Top View

Angled Groove Plate

V-Groove Edge Closeup

▍Key Product Advantages

1. Uniform gas flow distribution improves coating yield. The parallel flow channels on the plate surface disperse the reaction gas in layers, ensuring consistent gas flow velocity across the wafer surface. This keeps film deposition thickness deviations within ±2%, resulting in a yield improvement of more than 15% compared to flat graphite plates without channels, thereby significantly reducing customers’ production costs.

2. High-temperature resistance and thermal shock resistance ensure stable performance under vacuum conditions. It withstands temperatures up to 3000°C in a vacuum environment and does not crack, deform, or warp during repeated temperature cycles, making it suitable for both intermittent and 24-hour continuous production modes in CVD equipment.

3. High resistance to acid and alkali corrosion; compatible with diverse process gases. Resistant to corrosion from hydrogen, argon, silane, and various halides; will not erode or powderize in corrosive gaseous environments. Suitable for a wide range of coating processes, including silicon carbide, gallium nitride, and oxide films.

4. Full-range custom manufacturing to fit all equipment models. There are no restrictions on sheet length, width, thickness, or slot patterns. Whether for small laboratory prototypes, pilot-scale furnaces, or large-scale CVD deposition equipment for mass production, we can provide one-on-one custom-machined graphite plates with dedicated slots, eliminating the need for customers to settle for generic standard parts.

5. Complete set of original manufacturer quality inspection reports ensures worry-free export compliance. Each batch of slotted graphite plates comes with third-party physical and chemical test reports, including data on density, ash content, flexural strength, and electrical and thermal conductivity coefficients, meeting the quality inspection and audit standards of overseas semiconductor manufacturers’ supply chains.

6. Stable Production Capacity; We Accept Orders of All Sizes. Sample orders start at just one piece, while our monthly production capacity for bulk orders is 50,000 units. Standard-spec grooved graphite plates are delivered within 7–10 days, and complex, custom-shaped grooved plates are processed within 12–15 business days.

Narrow Groove Long Plate

Ultra-Fine Groove Panel

Wide Groove Thick Plate

▍Product Specifications

The following are typical technical specifications; customization is also available based on customer requirements.

Custom Specifications for Sheets and Grooves

1. Sheet Dimensions: Maximum machinable dimensions are 1200 × 800 mm (length × width), with a thickness of 3–50 mm;

2. Groove Types: Wide rectangular grooves, fine-toothed grooves, trapezoidal flow-guiding grooves, and segmented composite grooves of varying depths;

3. Groove Parameters: Groove width 0.5–20 mm, groove depth 1–15 mm, groove spacing customized as required;

4. Panel Shapes: Standard rectangular panels, rounded-corner panels, and graphite panels with custom-shaped cutouts and grooves can all be processed.

▍Product Application Scenarios and Their Advantages

• CVD (Chemical Vapor Deposition) System

Used for thin-film growth, passivation layer deposition, and silicon oxide/silicon nitride coating

Advantages: Uniform flow channels balance the gas flow, improving chip yield. Ultra-high-purity substrates                          prevent  chip contamination.

• CVD Equipment for Vacuum Coating of Optical Lenses

Suitable for thin-film coating of optical glass, lenses, and infrared lenses

Advantages: A fine, shallow groove design reduces the risk of lens scratches; high-purity graphite prevents impurity leaching that could cause lens haze; high-temperature thermal stability ensures consistent chromatic aberration across the coating.

• Small-Scale Laboratory Vacuum CVD Furnace for Research

Designed specifically for new materials R&D and thin-film experimentation at universities and research institutions

Advantages: Supports customization for small sizes and special irregularly shaped grooves; enables rapid prototyping of single samples; allows adjustment of graphite purity levels to meet R&D requirements.

CVD Tube Furnace

Optical Coating CVD

Lab CVD Reactor

▍Packaging and Logistics

1. Inner Protection: Fully enclosed in individual bubble wrap, with soft foam padding in the slotted areas to prevent bumps, scratches, and damage to the slot walls and corners during transport;

2. Outer Packaging: Thickened plywood crate with internal fixed partitions and a moisture- and water-resistant laminate coating, suitable for export via ocean freight and air freight;

3. Logistics Support: Supports full-container sea freight, small-package air freight, and international express (DHL/FedEx/UPS). Wooden crates come with shipping marks, packing lists, and material test reports for streamlined customs clearance;

4. Protective Advantages: Graphite is a brittle material; custom cushioning packaging prevents damage during long-distance transport, reducing overseas delivery losses and after-sales costs.

▍FAQ

• Q1: Compared to standard flat graphite plates, what are the key advantages of grooved graphite plates in CVD equipment?

  A1: Standard flat graphite plates can cause localized gas accumulation inside the furnace, resulting in uneven coating thickness on silicon wafers. In contrast, slotted graphite plates use surface channels to evenly distribute process gases, ensuring uniform coating across the entire substrate. Additionally, the slotted structure increases the heat dissipation area, reducing the rate of localized high-temperature oxidation and effectively extending the service life.

  
  

• Q2: Can you customize the groove patterns based on CAD drawings provided by customers?

  A2: Absolutely. Customers can provide equipment drawings, samples, or groove dimension parameters—any of these will suffice. Our technical engineers will prepare a machining confirmation drawing, and production will begin only after verification. We can customize complex composite grooves and irregularly shaped plates.

  
  

• Q3: Can this grooved graphite plate undergo anti-oxidation treatment? Is wear and tear significant during long-term mass production?

  A3: We can provide a specialized vacuum high-temperature anti-oxidation impregnation coating treatment. After treatment, the service life of the slotted graphite plate is extended by 40% under continuous operation at 2000°C. Compared to ordinary industrial graphite on the market, our high-purity substrate has lower porosity, making it harder for gases to penetrate the interior, and the replacement cycle is doubled under normal mass production conditions.

  
  

• Q4: How does the slotted graphite plate perform in terms of corrosion resistance? Which process gases is it compatible with?

  A4: The base material itself offers excellent resistance to acids, alkalis, and halides. It is compatible with silane, hydrogen, argon, nitrogen, and various metal-organic vapor phase sources, meeting the requirements of the vast majority of CVD process gas environments in semiconductor and optical coating applications.

  
  

• Q5: Are slotted graphite plates prone to breaking during shipping, and how are damaged items handled?

  A5: All slotted graphite plates are protected with multi-layered packaging consisting of individual bubble wrap, cardboard boxes, and plywood crates, with reinforced corners and edges. If damage occurs during shipping, simply provide photos of the damage to receive a free replacement. Overseas orders are supported by comprehensive after-sales service.